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Category
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Article
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Author
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Fujimura, Shuzo: H. Yano; J. Konno
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Article Title
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Ion implantation change in the chemical structure of a resist
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Institution
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Nuclea Instrument and Methods
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Volume
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B39
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Number
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809
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Page
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Date
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1989
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1989/12/31
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