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Category
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Article
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Author
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Fujimura, Shuzo: K. Shinagawa: M. Nakamura: H. Yano
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Article Title
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Additive nitrogen effects on oxygen plasma downstream ashing
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Institution
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Japanese Journal of Applied Physics
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Volume
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29
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Number
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2165
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Page
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Date
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1990
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1990/12/31
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