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Category
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Article
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Author
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Fujimura, Shuzo:Y.Morikawa:K.Kubota:H.Ogawa:T.Ichiki:A.Tachibana:Y.Horiike
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Article Title
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Reaction of the fluroine atom and molecule with the hydrogen-terminated Si(111) surface
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Institution
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Journal of Vacuum Science and Technology
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Volume
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vol. A16(1)
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Number
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Page
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345
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Date
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1998
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1998/12/31
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