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Category
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Article
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Author
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Hayami,Y.:M. T. Suzuki:Y. Okui:H. Ogawa:S. Fujimura
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Article Title
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Characterization of cleaning technology for silicon surfaces by hot water containing little dissolved oxygen
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Institution
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Japan Journal of Applied Physics
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Volume
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vol.35
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Number
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Page
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4577
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Date
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1996
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1996/12/31
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