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Category
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Article
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Author
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Suzuki,M. T.:J. Kikuchi:M. Nagasaka:S. Fujimura
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Article Title
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Etching characteristics during cleaning of silicon surfaces by NF3-added hydrogen and water-vapor plasma downstream
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Institution
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Materials Research Society symposia proceedings
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Volume
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Vol.477
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Number
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167
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Page
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Date
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1997
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1997/12/31
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