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Category
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A Book Chapter
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Author
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Ogawa,H.:C. Inomata:K. Ishikawa:S. Fujimura:H. Mori
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Article Title
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Native oxide characterization on silicon surfaces
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Editor
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Ohdomari, I.:M. Oshima:A. Hiraki
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Book Title
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Control of Semiconductor interfaces
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Page
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pp. 447-452
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Place Published
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Amsterdam, London, New York, Tokyo
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Publisher
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ELSEVIER
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Date
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1994
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1994/12/31
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