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Category
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A Book Chapter
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Author
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Fujimura,S.: \K. Ishikawa:H. Mori
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Article Title
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Observation of thin SiO2 films using IR-RAS
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Editor
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C. R. Helms and B. E. Deal
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Book Title
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The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2
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Page
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pp. 91-98
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Place Published
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New York
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Publisher
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Plenum Press
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Date
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1993
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Abstract
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Notes
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URL
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Label
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技術経営
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Register date
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1993/12/31
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