|
Category
|
Article
|
|
Author
|
Kohzu, Hideaki
|
|
Article Title
|
Infrared rapid thermal annealing for GaAs device fabrication
|
|
Institution
|
Journal of Applied Physics
|
|
Volume
|
Vol. 54
|
|
Number
|
Issue 9
|
|
Page
|
pp. 4998-5003 (with coauthors)
|
|
Date
|
1983/09
|
|
Abstract
|
|
|
Notes
|
|
|
URL
|
|
|
Label
|
技術経営
|
|
Register date
|
1983/12/31
|
