Detail Information
Category
Article
Author
Kohzu, Hideaki
Article Title
Infrared rapid thermal annealing of Si -implanted GaAs
Institution
Applied Physics Letters
Volume
Vol. 41
Number
Issue 8
Page
pp. 755-758 (with coauthors)
Date
1982/10/15
Abstract
Notes
URL
Label
技術経営
Register date
1982/12/31
